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NORDSON MARCH AP-600Plasma System
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    Nordson AP-600 Plasma System Features:


    Touch screen control and graphical user interface give real-time process information 

    Flexible shelf architecture allows processing of a wide variety of piece parts, components or carriers 

    13.56 MHz RF generator with automatic matching network delivers excellent process repeatability

    Convenient facility hook-ups for periodic calibration requirements used in validation processes


    Nordson AP-600 Plasma System Benefits:


    State-of-the-art plasma treatment in a compact, bench-top configuration

    The AP-600 system from Nordson MARCH is designed to deliver exceptionally uniform plasma cleaning and treatment with unmatched ease of operation, reliability and low cost.

    The AP-600 system is completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels.

    The plasma chamber is constructed of high-quality aluminum with aluminum fixtures for superior durability. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats.


    Plasma cleaning, surface activation and adhesion improvement 

    The AP-600 system is suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. 

    The AP-600 system can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. The system comes standard with two electronic mass flow controllers for optimal gas control, with another two available optionally (four total max.).



    Nordson AP-600 Plasma System Specifications:


    Enclosure

    Dimensions

    W x D x H – Footprint

    569W x 869D x 704H mm

    (22W x 34D x 28H in.)

    Net Weight

    221 kg (487 lbs)

    Equipment Clearance

    Right, Left, Front -569 mm (22 in.), 

    Back – 254 mm (10 in.)

    Chamber

    Maximum Volume

    50.4 liters (3076 in3)

    Variable Electrode

    Configurations

    Power-Ground, Ground-Power, Power-Power

    Number of Electrode Positions

    7

    Electrode Pitch

    25.4 mm (1 in.)

    Electrodes

    Powered Working Area

    330W x 330D mm (13W x 13D in.)

    Ground/Perforated 

    Working Area

    368W x 330D mm (14.5W x 13D in.)

    Floating Working Area

    330W x 330D mm (13W x 13D in.)

    RF Power

    Standard Wattage

    600 W

    Frequency

    13.56 MHz

    Gas Control

    Available Flow Volumes

    10, 25, 50, 100, 250 or 500 sccm

    Maximum Number of MFCs

    4

    Control &Interface

    Software Control

    PLC Control with Touch Screen Interface

    Remote Interface

    PlasmaLINK, ProcessLINK

    Vacuum Pump

    Standard Wet Pump

    19.5 cfm with Oxygen Oil Mist Eliminator

    Optional Wet Pump

    19.5 cfm with Corrosive Oil Mist Eliminator

    Optional Purged Dry Pump

    22 cfm

    N2 Purged Pump Flow

    2 slm

    Facilities

    Power Supply

    110 VAC, 20A, 50/60 Hz, Single Phase, 

    12 AWG, 3-Wire or 220 VAC, 10A, 

    50/60 Hz, Single Phase, 12 AWG, 3-Wire

    Process Gas 

    Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Process Gas Purity

    Lab or Electronic Grade

    Process Gas Pressure

    0.69 bar (10 psig) min. to 1.03 bar 

    (15 psig) max., regulated

    Purge Gas Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Purge Gas Purity

    Lab or Electronic Grade N2/CDA

    Purge Gas Pressure

    2 bar (30 psig) min. to 6.9 bar 

    (100 psig) max., regulated

    Pneumatic Valves 

    Fitting Size & Type

    6.35 mm (0.25 in.) OD Swagelok Tube

    Pneumatic Gas Purity

    CDA, Oil Free, Dewpoint ≤7°C(45°F),

    Particulate Size<5 μm

    Pneumatic Gas Pressure

    3.45 bar (50 psig) min. to 6.89 bar 

    (100 psig) max.,regulated

    Exhaust

    38 mm (1.5 in.) OD Pipe Flange

    Compliance

    SEMI

    S2/S8 (EH&S/Ergonomics)

    International

    CE Marked

    Ancillary

    Equipment

    Gas Generators

    Nitrogen, Hydrogen

    (Requires Additional Non-Optional Hardware)

    Facilities

    Chiller, Scrubber




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